供應半導體材料設備_硅片外延爐_電子材料、零部件、結構_電子元器件_貨源

產品品牌：東芝Nuflare

EGV-30GX

Vertical-type standard EGV series epitaxial growth system on an expanded scale

The EGV series, which has earned the trust of users in Japan and around the world for more than 20 years with its superior performance, has now evolved to the EGV-30GX, which maximizes quality, production, and economy.
With our low and high resistivity control achieved through multi-layer epitaxy, we have now devised a high cost-performance model to meet users’ diverse needs.

■ Up to 20% productivity improvement in 6-inch wafers
■ Throughput boosted 13% by overlap control, higher quality epitaxy, and 25% reduction in CoO (cost of ownership) (compared to existing NFT models ? 10μm epitaxy products)
■ Supports needs of today’s power devices with their higher voltages; allows ultra pressure membrane epitaxy and multi-layer epitaxy
■ Footprint reduced 15% by compact layout!
■ Simpler recipe running thanks to touch panel operation screen and Windows-based operation panel
■ Also ideal for As dope polysilicone growth!

新手教學

供應半導體材料設備_硅片外延爐_電子材料、零部件、結構_電子元器件_貨源_批發一路發

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