HIGHLIGHTS
-> Low pressures for sensitive applications
-> Constant voltage driven
-> Dual inline package (DIP)
-> Fully temperature compensated and calibrated
TYPICAL APPLICATIONS
-> Medical equipment
-> Respiration
-> HVAC
-> Level detection
-> Flow measurement
-> Industrial control
TECHNICAL FEATURES
-> 0.15, 0.3, 0.8, 1.5 PSI/ 1.0, 2.1, 5.5, 10.3 kPa
-> Easy-to-use dual inline package (DIP)
-> Zero offset calibration
-> High-performance, stable, packaged silicon chip
-> Wide 0-600C compensated temperature range
DEscriptION
The SM5600 Series of OEM pressure sensors are laser trimmed for enhanced performance, temperature-compensated, low-
pressu re sensors in dual in-line packages for printed circuit board mounting. These sensors offer improved performance, as
well as the option for constant voltage excitation. With the ability to detect pressure ranges as low as 0.15 PSI, the SM5652
is ideal for applications req uiring extreme sensitivity from respiration to air filter obstructions.
The SM5600 Series pressure sensors are constructed by attaching a highly sta ble piezoresistive pressu re sensor chip to a
ceramic substrate. Thick film resistors on the ceramic are laser trimmed during manufacturing to provide zero offset calibration,
temperature compensation for zero offset, and temperature compensation for sensitivity.
Various pressu re port configu rations a re availa ble for flexibility in matching this product to specific applications.
ABSOLUTE MAXIMUM RATING TABLE FOR SM5652
All parameters are specifed at VSUPPLY = 10.00 V DC supply at room temperature, unless otherwise noted.
OPERATING CHARACTERISTICS FOR SM5652 - SPECIFICATIONS
All parameters are specifed at VSUPPLY = 10.00 V DC supply at room temperature, unless otherwise noted.
All dimensions are shown in millimeters
NOTES:
. Do not connect to NC pins.
. External connections to NC pins will cause part malfunction.
. Tolerance on all dimensions +0.13 mm unless otherwise specified.
. [B] is tube connected to bottom side of sensor die.
. [T] is tube connected to top side of sensor die.
. Tube [B] is used for positive differential pressure.
Pin Configuration
. Pins opposite direction of tube
PIN | DEscriptION |
1 | Sig- |
2 | -Vexc |
3 | Sig+ |
4 | +Vexc |
5 | NC |
6 | NC |
7 | NC |
8 | NC |
Tube Length
L: Long (12.45 mm + 0.10 mm)
S: Short (8.25 mm + 0.10 mm)
Pressure Type
D: Differential (2 Tubes)
G: Gauge(1 Tube, [B] tube only)
Ordering Information
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