ng>項目 / 型式ng>ng>ng>

ng>SURFCOM  1900DXng>ng>3ng>ng>/SDng>ng>3ng>

-12

-13

-14

-15

-22

-23

-24

-25

ng>量測範圍ng>ng>ng>

ng>Zng>ng>軸（縱方向）ng>ng>ng>

50mm

ng>Xng>ng>軸（橫方向）ng>ng>ng>

100mm

200mm

ng>精度ng>ng>ng>

ng>粗度檢出器ng>ng>ng>

ng>檢出器測量解析度ng>ng>ng>

0.01μm/1000μm測量範圍~0.0001μm/6.4μm測量範圍

ng>輪廓用檢出器ng>ng>ng>

ng>Zng>ng>軸指示精度ng>ng>ng>

±(1.8+|2H|/100)μm  H:測量高度(mm)

ng>測量解析度ng>ng>ng>

0.1μm/5mm測量範圍,0.4μm/20mm測量範圍,1μm/50mm測量範圍

ng>驅動部粗度ng>ng>ng>

ng>Xng>ng>軸測量解析度ng>ng>ng>

0.04μm或者32,000點（數據取入數3000，000點）

ng>驅動部輪廓ng>ng>ng>

ng>Xng>ng>軸指示精度ng>ng>ng>

±（1.0+1L/100）μm

ng>測量解析度ng>ng>ng>

0.016μm

ng> ng>ng>真直度精度ng>ng>ng>

粗度：(0.05+1.0L/1000)μm L:量測長度(mm)  輪廓：1μm/100mm、2μm/200mm

ng>感應方式ng>ng>ng>

ng>Xng>ng>軸（橫方向）ng>ng>ng>

Moire光柵尺

ng>Zng>ng>軸（縱方向）ng>ng>ng>

ng>粗度ng>ng>ng>

差動變壓器

ng>輪廓ng>ng>ng>

差動變壓器

ng>速度ng>ng>ng>

ng>立柱上下速度(Z軸)ng>ng>ng>

3~10mm/s

ng>測量速度(X軸)ng>ng>ng>

測量速度：0.03~20mm/s,移動速度：最大60mm/s

ng>檢出器ng>ng>ng>

ng>粗度ng>ng>ng>

ng>測定子、測定力ng>ng>ng>

交換式、0.75mN以下

ng>測針半徑、材質ng>ng>ng>

2μmR,（60°圓錐鑽石材質.）1支標準付屬品

ng>輪廓ng>ng>ng>

ng>測定子、測定力ng>ng>ng>

交換式、30mN以下

ng>測針半徑、材質ng>ng>ng>

2μmR,（24°圓錐鑽石材質.）2支標準付屬品

ng>測量方向、方式ng>ng>ng>

拉、壓方向、上下方向、最大尋跡角度：77°

ng>移動范圍ng>ng>ng>

ng>驅動部行程ng>ng>ng>

100mm

200mm

ng>立柱上下動行程ng>ng>ng>

244mm

444mm

644mm

244mm

444mm

644mm

ng>平臺ng>ng>ng>

ng>尺寸ng>ng>ng>

600×320mm

1000×450mm

600×320mm

1000×450mm

ng>容許載重量ng>ng>ng>

37kg

28kg

93kg

84kg

31kg

22kg

87kg

78kg

ng>其它ng>ng>ng>

ng>設置尺寸ng>ng>ng>

ng>橫ng>ng>ng>

1250mm

1650mm

1250mm

1650mm

ng>深ng>ng>ng>

800mm

900mm

800mm

900mm

ng>高ng>ng>ng>

1480mm

1680mm

1880mm

1480mm

1680mm

1880mm

ng>質量ng>ng>ng>

225kg

235kg

420kg

430kg

230kg

240kg

425kg

435kg

ng>電源、消耗電力ng>ng>ng>

單相AC100V±10％(要接地)﹑50/60Hz/ 670VA