SPECIFICATIONS： | ||
| Physical | Excel 5120 | Excel 5220 |
| Measuring Volume | 900*1200*150mm(35.4"*4 7.2"*5.9") | |
| External Dimensions | L2285*1525*H1650 (90"*60"*65") | |
| Weight | 2050kg(4500lb) | |
| Capacity | 100kg(220lb) | |
| Stage | Steel | |
| base Mdterial | Granite | |
| Ways | Unique X&Y Monorail,Monorail Linear Z | |
| Motion Cortrol | Servo:CNC,Moues,and Pendant Control | |
| Power Requirements | 93-264VAC,47-63Hz,10Amp max. | |
| Performance | Excel 5120 | Excel 5220 |
| XY Accuracy | U=5.0+L/300μm | |
| Z Accuracy | U=3.0+L/150μm | |
| XY Repeat | 5.0μm(0.000200") | |
| Z Repeatability | 3.0μm(0.000120") | |
| X,Y Acceleration | 1000mm/s2(40"/s2) | |
| Z Acceleration | 500mm/s2(20"/s2) | |
| X,Y Speed | 150mm/s2(20"/s2) | |
| Scale Resolution | 0.5μm(0.000020") | |
| Features | Excel 5120 | Excel 5220 |
| Video | Hi-Res B&W | Hi-Res Color |
| lllumination Source | Red LEDs | White LEDs |
| Lighting | Surface,Profile,and Axial | |
| Optics/Magnification | 12:1 Programmable Zoom/～17x-400x | |
| Software | InSpec for Windows Metrolongy Software | |
| Computer | 1.2GHz,256MB RAM,Windows2000,CD-RW,Ethernet Card | |
| Environmental | 20℃(680F)±20,30-80% Humiditiy | |
| Warranty | 1Year Parts and Service | |
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