日本大阪Osaka真空泵TG220F系列報價_其他泵_泵_機械設備_貨源

日本大阪Osaka真空泵TG220F系列報價,特點任何方向，尺寸緊湊，節能，快速啟動，快速關閉氣孔。空氣浪湧測試。串行通信。符合國際公認的安全標準NRTL/SEMI-S2/CE

Inlet flange	VG100 CF100 ISO-R100
Volume flow rate (L/s) N2	220
(with protective screen) N2	210
H2	100
Max. compression ratio N2	1x10⁸
H2	4x10²
Ultimate pressure (Pa)	<1x10^-6
(Torr)	<7.5x10^-9
Max. throughput^*1(sccm) N2	400
Startup time (min)	1-1.2
Shutdown time (min)	2.5-3.5
Max. backing pressure (Pa/Torr)	260/2
Recommended backing vacuum pump (L/min)	≧80
Position	Any orientation
Weight (kg) VG, ISO-R/CF	5.5/8
Controller	TC223/TC222^*2

*1 : When using a backing vacuum pump of 160L/min.

*2 : Compact built in type.

[Ambient temperature for use]

The ambient temperature range to ensure you reach the ultimate pressure is 10-23℃. The permissible ambient temperature is 10-32℃ for air cooling type and 10-40℃ for water cooling type. The maximum temperature for the cooling water which ensures the ultimate pressure is 30℃ and the allowable temperature range for cooling water is 10-35℃.

[Corresponding gases]

Some service gases can deteriorate the lubrication grease and internal parts. Contact Osaka Vacuum for a list of applicable gas types.

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