SPEC:
Grade (等級) | Dummy (假片) & Test (測試片) |
Growth Method (生長方法) | CZ (直拉法),FZ (區熔法) |
Diameter (直徑) | 2”, 3”, 4”, 5”, 6”, 8”, 12” |
CrystalOrientation (晶向) | <100>, <111>, <110> |
Conductivity Type (導電類型) | P-Type or N-Type (P型或N型) |
Dopant (摻雜劑) | P (Boron-硼) N (Phosphorus-磷, Antimony-銻or Arsenic-砷) |
Resistivity (電阻率) | 0.001 ~ 30,000 ?.cm |
Oxygen Content (氧含量) | 16 3 < 3.0 x 10 cm |
Carbon Content (碳含量) | 16 3 < 3.0 x 10 cm |
Wafer Thickness (厚度) | According to SEMI standard or customer requirements (按SEMI標準或客戶要求) |
Surface Finish (表面處理方式) | As-cut, lapped, etched or polished (切片,研磨,蝕刻或拋光) |
Bow & Warp (彎曲度和翹曲度) | < 30 μm |
Note: The table summarizes the general product specifications, more specific requirements can be further discussed (表中概括瞭常規產品參數,對產品有更特殊的要求可來電咨詢). |
另外,可以提供晶圓片減薄加工業務。
圖一:100um
圖二:50um
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